Oehrlein, G. S..Materials, technology, and reliability for advanced interconnects and low-k dielectrics: symposium held April 23-27, 2000, San Francisco, California, U.S.A.Cambridge University Press,2014.
Materials, technology, and reliability for advanced interconnects and low-k dielectrics: symposium held April 23-27, 2000, San Francisco, California, U.S.A
