Integrated circuit metrology, inspection, and process control.Integrated circuit metrology, inspection, and process control (1987 : Santa Clara).SPIE,1987.
Integrated circuit metrology, inspection, and process control VI.Integrated circuit metrology, inspection, and process control VI (1992 : San Jose).SPIE,1992.
Integrated circuits metrology, inspection and process control V.Integrated circuit metrology, inspection and process control V (1991 : San Jose).SPIE,1991.
William Arnold,Integrated circuit metrology inspection, and process control IV.Integrated circuit metrology inspection, and process control IV (1990 : San Jose, Calif.).SPIE,1990.
