, Frank W. DelRio.Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010] , Boston, Massachusetts, U.S.A. /.Cambridge University Press,,2014..
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LaVan, David A..Microelectromechanical systems--materials and devices: symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A..Materials Research Society,,2012..
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