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题名:
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IEEE transactions on semiconductor manufacturing / IEEE Components, Hybrids, and Manufacturing Technology Society.等 , |
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载体形态:
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v. : ill. ; 28 cm. |
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出版发行:
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出版地： New York 出版社： Institute of Electrical and Electronics Engineers 出版日期： 1988- |
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主题词:
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Semiconductors Design and construction |
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其它题名:
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Transactions on semiconductor manufacturing |
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其它题名:
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Semiconductor manufacturing |
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ISSN:
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0894-6507 价格： |
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附注:
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Title from cover. |
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主要团体责任者:
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IEEE Components, Hybrids, and Manufacturing Technology Society. |
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主要团体责任者:
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IEEE Electron Devices Society. |
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主要团体责任者:
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IEEE Reliability Society. |
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主要团体责任者:
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IEEE Solid-State Circuits Council. |
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主要团体责任者:
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Institute of Electrical and Electronics Engineers. |