HEA|  |02086nam0 2200373   45  
000|  |143864
001|  |97002434
011|  |▼a0734-211X
040|  |▼aJVTBD9
092|  |▼aCN▼b534B0001-2
100|  |▼a19920916a19839999m  y0engy0120    ba
101|0 |▼aeng
102|  |▼aUSA
110|  |▼aaga    0uu0
200|10|▼aJournal of Vacuum Science & -
   |  |Technology B▼gAmerican Vacuum Society
207| 0|▼as.2, v.1 (1983)-
210|  |▼aNew York, N.Y.▼cAmerican Ins-
   |  |titute of Physics▼d1983-
300|  |▼aCoverage by abstracting and -
   |  |indexing publication: Computer-
   |  | & control abstracts = ISSN 0036-8113
300|  |▼aCoverage by abstracting and -
   |  |indexing publication: Electric-
   |  |al & electronics abstracts = I-
   |  |SSN 0036-8105
300|  |▼aCoverage by abstracting and -
   |  |indexing publication: Physics -
   |  |abstracts. Science abstracts. -
   |  |Series A = ISSN 0036-8091
300|  |▼aCoverage by abstracting and -
   |  |indexing publication: Metals a-
   |  |bstracts = ISSN 0026-0924
300|  |▼aCoverage by abstracting and -
   |  |indexing publication: World al-
   |  |uminum abstracts = ISSN 0002-6697
300|  |▼aCoverage by abstracting and -
   |  |indexing publication: SPIN
300|  |▼aCoverage by abstracting and -
   |  |indexing publication: Chemical-
   |  | abstracts = ISSN 0009-2258
300|  |▼aCoverage by abstracting and -
   |  |indexing publication: Coal abs-
   |  |tracts = ISSN 0309-4979
300|  |▼aCoverage by abstracting and -
   |  |indexing publication: Current -
   |  |physics index = ISSN 0098-9819
431|  |▼12001▼a0022-5355
530|0 |▼aJournal of vacuum science & -
   |  |technology. B, Microelectronic-
   |  |s processing and phenomena
531|  |▼aJ. vac. sci. technol., B, Mi-
   |  |croelectronics process. phenom.
541|1 |▼a（美）真空科学与技术杂志．Ｂ辑，微电子处理与现象-
676|  |▼a621.5/5/05
690|  |▼aO552
712|0 |▼aAmerican Vacuum Society
905|  |▼a801▼b000500014940▼b000500014-
   |  |031▼b000500163309▼b00050004079-
   |  |6▼b000500015749▼b000410018372▼-
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   |  |500165742▼b000500525309▼b00050-
   |  |0525291▼b000500526661▼b0005005-
   |  |08073▼b000500507711▼b000410034-
   |  |924▼b000410035326▼b00050052668-
   |  |7▼b000500155107▼d534