HEA|  |01143nam0 2200289   45  
000|  |143863
001|  |97002433
005|  |190116151402.0
011|  |▼a0734-2101
040|  |▼aJVTAD6
092|  |▼aCN▼b534B0001-1
100|  |▼a19920916a19839999m  y0engy0120    ba
101|0 |▼aeng
102|  |▼aUSA
110|  |▼aaga    0uu0
200|10|▼aJournal of vacuum science & -
   |  |technology▼hA
207| 0|▼as.2, v.1 (1983)-
210|  |▼aNew York, N.Y.▼cAmerican Ins-
   |  |titute of Physics▼d1983-
431|  |▼12001▼a0022-5355
530|0 |▼aJournal of vacuum science & -
   |  |technology. A. Vacuum, surface-
   |  |s, and films
531|  |▼aJ. vac. sci. technol., A, Va-
   |  |c. surf. films
541|1 |▼a（美）真空科学与技术杂志．Ａ辑，真空、表面与膜-
676|  |▼a621.5/5/05
690|  |▼aO552
712|0 |▼aAmerican Vacuum Society
712|0 |▼aAmerican Institute of Physics
905|  |▼a801▼b000500014049▼b000500156-
   |  |238▼b000500014338▼b00050016003-
   |  |2▼b000500348744▼b000500156964▼-
   |  |b000500350336▼b000500525283▼b0-
   |  |00500525275▼b000500161345▼b000-
   |  |500515490▼b000500511713▼b00050-
   |  |0507737▼b000500507729▼b0005005-
   |  |05368▼b000410035043▼b000410035-
   |  |110▼b000500011581▼b000500041182▼d534