HEA|  |00712nam0 2200193   45  
000|  |141995
001|  |97002554
011|  |▼a0167-9317
092|  |▼aCN▼b736LB003
100|  |▼a19920916a19839999m  y0engy0120    ba
101|0 |▼aeng
102|  |▼aNLD
110|  |▼aaha    0uu0
200|10|▼aMicroelectronic engineering
207| 0|▼av.1 (1983)-
210|  |▼aAmsterdam▼cElsevier Science -
   |  |Publishers B.V.
541|1 |▼a（荷）微电子工程
690|  |▼aTN4
905|  |▼a801▼b000410018413▼b000410013-
   |  |277▼b000410015036▼b00041001483-
   |  |1▼b000410014852▼b000410015037▼-
   |  |b000410032797▼b000410034965▼b0-
   |  |00410035145▼b000410035140▼b000-
   |  |410011187▼b000410011047▼b00041-
   |  |0011105▼b000410017516▼b0004100-
   |  |12948▼b000410033801▼b000410033-
   |  |799▼b000410032931▼d736