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科图分类法:
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TN305.7 版次： |
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中图分类法:
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TN305.7 版次： |
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题名:
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Lithography : [ main techniques /] / , |
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出版发行:
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出版地： London : 出版社： ISTE ; 出版日期： 2011. |
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载体形态:
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xxv, 377 p. : ill. ; 24 cm. |
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内容提要:
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"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--Provided by publisher. |
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主题词:
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Microlithography. |
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主要责任者:
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Landis, Stefan. |
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索书号:
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1 |