|
中图分类法:
|
TB383 版次： |
|
著者:
|
Hawkeye, Matthew M., |
|
题名:
|
Glancing angle deposition of thin films : [ engineering the nanoscale /] / , |
|
载体形态:
|
xiv, 299 pages : illustrations ; 26 cm. |
|
主题词:
|
Nanotechnology. |
|
主题词:
|
Chemical vapor deposition. |
|
主题词:
|
Nanoelectromechanical systems Design and construction. |
|
主要责任者:
|
Taschuk, Michael T., |
|
主要责任者:
|
Brett, Michael J., |
|
索书号:
|
1 |