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中图分类法:
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TN47 版次： |
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著者:
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Zalevsky, Zeev. |
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题名:
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New approaches to image processing based failure analysis of nano-scale ULSI devices / / , |
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出版发行:
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出版地： Amsterdam : 出版社： Elsevier/William Andrew, 出版日期： [2014] |
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载体形态:
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101 pages : illustrations ; 23 cm. |
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内容提要:
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New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise. |
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主题词:
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Integrated circuits Ultra large scale integration |
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主题词:
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Nanoelectronics. |
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主题词:
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Microelectronics. |
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主题词:
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Computers and IT. |
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主要责任者:
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Livshits, Pavel. |
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主要责任者:
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Gur, Eran. |
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索书号:
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1 |