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中图分类法:
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TN40-532 版次： |
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题名:
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Materials issues and modeling for device nanofabrication [ symposi held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. ] / , |
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出版发行:
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出版地： Warrendale, Pa. 出版社： Materials Research Society, 出版日期： 2014. |
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载体形态:
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xiii, 340 p. ill. 24 cm. |
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附注:
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Originally published: 2000. |
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主题词:
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Integrated circuits Design and construction |
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主题词:
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Nanotechnology Congresses. |
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主题词:
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Integrated circuits Materials |
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主题词:
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Molecular electronics |
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主题词:
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Microlithography |
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主要责任者:
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Merhari, Lhadi, |
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索书号:
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1 |