|
中图分类法:
|
TN304.2 版次： |
|
题名:
|
Silicon front-end technology [ Materials processing and modelling : Symposium held April 13-15, 1998 in San Francisco, California, U.S.A. /] / , |
|
出版发行:
|
出版地： Warrendale, Pa. 出版社： Materials Research Society, 出版日期： 2014. |
|
载体形态:
|
xi, 228 p. ill. (some col.) 24 cm. |
|
附注:
|
Originally published: 1998. |
|
主题词:
|
Semiconductors Design and construction |
|
主题词:
|
Semiconductor doping |
|
主题词:
|
Semiconductors Defects |
|
主要责任者:
|
Cowern, Nicholas E. B. |
|
索书号:
|
1 |