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中图分类法:
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TN304-532 版次： |
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题名:
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Materials, technology, and reliability for advanced interconnects and low-k dielectrics--2004 : [ symposium held April 13-15, 2004, San Francisco, California, U.S.A /] / , |
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版次:
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1st pbk. ed. |
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出版发行:
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出版地： Warrendale, Pa. : 出版社： Materials Research Society, 出版日期： 2012. |
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载体形态:
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xiii, 402 p. : ill., forms ; 24 cm. |
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附注:
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Previous edition: 2004. |
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内容提要:
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. |
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主题词:
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Semiconductors Materials |
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主题词:
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Semiconductors Junctions |
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主题词:
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Dielectric films |
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主题词:
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Integrated circuits Materials |
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主题词:
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Integrated circuits Reliability |
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主要责任者:
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Carter, R. J. |
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索书号:
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1 |