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中图分类法:
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TN305.3 版次： |
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题名:
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Doping engineering for device fabrication : [ symposium held April 18-19, 2006, San Francisco, California, U.S.A. /] / , |
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其它题名:
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Sub-second rapid thermal processing for device fabrication |
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出版发行:
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出版地： Cambridge : 出版社： Cambridge University Press, 出版日期： 2014. |
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载体形态:
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230 p. : ill. ; 24 cm. |
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附注:
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"This volume contains papers presented at Symposium C, 'Sub-Second Rapid Thermal Processing for Device Fabrication,' held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref. |
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主题词:
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Semiconductor doping |
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主题词:
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Semiconductors Materials |
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主题词:
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Semiconductors Design and construction |
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主要责任者:
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, B.J. Pawlak |
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次要责任者:
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Symposium on Sub-Second Rapid Thermal Processing for Device Fabrication |
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索书号:
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1 |