中图分类法:
TN47-532 版次:
题名:
Materials, processes, integration and reliability in advanced interconnects for micro- and nanoelectronics : [ symposium held April 10-12, 2007, San Francisco, California, U.S.A. /] / ,
出版发行:
出版地: Cambridge : 出版社: Cambridge University Press, 出版日期: 2014.
载体形态:
358 p. : ill. ; 24 cm.
附注:
"Symposium B, 'Materials, Processes, Integration and Reliability in Advanced Inteconnects for Micro- and Nanoelectronics,' the MRS 'interconnect symposium'," [was] held April 10-12 at the 2007 MRS Spring Meeting in San Francisco, California"--Pref.
主题词:
Interconnects (Integrated circuit technology)
主题词:
Integrated circuits Very large scale integration
主题词:
Microelectronics
主题词:
Nanoelectronics
主题词:
Materials
主要责任者:
, Qinghuang Lin
索书号:
1