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中图分类法:
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TN305.3 版次： |
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题名:
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Doping engineering for front-end processing [ symposium held March 25-27, 2008, San Francisco, California, U.S.A.] / , |
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出版发行:
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出版地： Cambridge 出版社： Cambridge University Press 出版日期： 2014 |
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载体形态:
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336 p ill 24 cm |
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附注:
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"This volume contains papers presented at Symposium E, 'Doping engineering for front-end processing,' held March 25-27, 2008 at the 2008 MRS Spring Meeting in San Francisco, California."--Pref. |
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主题词:
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Semiconductor doping |
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主题词:
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Semiconductor doping Processing |
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主题词:
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Semiconductors Materials |
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主要责任者:
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Pawlak, B. J. |
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索书号:
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1 |