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中图分类法:
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TN604-532 版次： |
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题名:
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Microelectromechanical systems--materials and devices IV : [ symposium held November 29-December 3, [2010] , Boston, Massachusetts, U.S.A. /] / , |
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出版发行:
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出版地： Cambridge : 出版社： Cambridge University Press, 出版日期： 2014. |
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载体形态:
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ix, 207 p. : ill. ; 24 cm. |
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附注:
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Papers presented at Symposium S, "Microelectromechanical Systems--Materials and Devices IV," held at the 2010 MRS Fall Meeting in Boston, Mass. |
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主题词:
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Microelectromechanical systems Materials |
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主题词:
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Microelectromechanical systems |
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主题词:
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Thin films |
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主题词:
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Nanostructured materials |
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主题词:
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Silicon |
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主要责任者:
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, Frank W. DelRio |
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索书号:
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1 |