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中图分类法:
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TN305.3 版次： |
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题名:
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Ion beam processes in advanced electronic materials and device technology [ symposium held April 15-18, 1985, San Francisco, California, U.S.A.] / , |
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出版发行:
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出版地： Cambridge 出版社： Cambridge University Press 出版日期： 2014 |
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载体形态:
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410 p ill 24 cm |
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附注:
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"These proceedings are a referred account of the Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology presented at the 1985 spring meeting of the Materials Research Society, April 15-18, 1985, in San Francisco, California."--Pref. |
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主题词:
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Semiconductors Congresses. |
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主题词:
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Ion implantation Congresses. |
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主要责任者:
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Appleton, B. R. |
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主要责任者:
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Eisen, Fred H. |
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主要责任者:
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Sigmon, T. W. |
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次要责任者:
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Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology |
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索书号:
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1 |