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中图分类法:
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TN4 版次： |
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著者:
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Kubby, Joel A. |
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题名:
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A guide to hands-on MEMS design and prototyping / / , |
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出版发行:
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出版地： Cambridge, UK ; 出版社： Cambridge University Press, 出版日期： 2011. |
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载体形态:
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xi, 166 p., [16] p. of plates : ill. (some col.) ; 24 cm. |
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内容提要:
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"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices. |
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主题词:
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Microelectromechanical systems. |
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索书号:
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1 |