|
中图分类法:
|
TP212 版次： |
|
中图分类法:
|
TH-39 版次： |
|
题名:
|
Smart sensors and MEMS : [ intelligent devices and microsystems for industrial applications /] / , |
|
其它题名:
|
MEMS |
|
其它题名:
|
Intelligent devices and microsystems for industrial applications |
|
载体形态:
|
xxii, 538 pages : illustrations ; 24 cm. |
|
主题词:
|
Detectors Industrial applications. |
|
主题词:
|
Microelectromechanical systems Industrial applications. |
|
主要责任者:
|
Nihtianov, S. |
|
主要责任者:
|
Luque, A. |
|
索书号:
|
1 |