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中图分类法:
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TN4-532 版次： |
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题名:
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Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : [ symposium held April 25-29, 2011, San Francisco, California, U.S.A. /] / , |
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出版发行:
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出版地： Warrendale, Penn. : 出版社： Materials Research Society ; 出版日期： 2012. |
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载体形态:
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ix, 127 p. : ill. ; 24 cm. |
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附注:
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"Symposium O, 'Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, held at the April 25-29, 2011 MRS Spring Meeting in San Francisco, California"--P. ix. |
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主题词:
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Interconnects (Integrated circuit technology) |
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主题词:
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Integrated circuits Very large scale integration |
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主题词:
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Microelectronics |
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主题词:
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Nanoelectronics |
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主题词:
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Materials |
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主要责任者:
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Baklanov, Mikhail R. |
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索书号:
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0 |