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题名:
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Advances in resist technology and processing II(1985 : Santa Clara, Calif.) / Larry F. Thompson, ed. , |
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ISBN:
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价格： ￥7.60 |
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语种:
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eng |
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载体形态:
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350 p. |
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出版发行:
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出版地： Bellingham, Wash. 出版社： SPIE 出版日期： 1985 |
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主要责任者:
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Thompson |
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主要团体责任者:
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Society of Photo-Optical Instrumentation Engineers |
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主要团体责任者:
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Advances in resist technology and processing II |
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索书号:
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3 |