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题名:
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Developments in semiconductor microlithography (1978 : San Jose, Calif) / Ed. by R. L. Ruddell , Socirty of Photo-Optical Instrumentation Engineers |
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ISBN:
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价格： ￥2.60 |
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语种:
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eng |
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载体形态:
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170 p. |
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出版发行:
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出版地： Wash. 出版社： SPIE 出版日期： 1978 |
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主要责任者:
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Ruddell |
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主要团体责任者:
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Society of Photo-Optical Instrumentation Engineers |
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主要团体责任者:
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Developments in semiconductor microlithography |
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索书号:
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1 |