中图分类法:	TN432 版次：
著者:	Tu, K. N.
题名:	Electronic thin film reliability / / ,
出版发行:	出版地： Cambridge ; 出版社： Cambridge University Press, 出版日期： 2010.
载体形态:	xvi, 396 p. : ill. ; 26 cm.
内容提要:	"Thin films are widely used in the electronic device industry. As the trend for miniaturization of electronic devices moves into the nanoscale domain, the reliability of thin films becomes an increasing concern. Building on the author`s previous book, Electronic Thin Film Science by Tu, Mayer and Feldman, and based on a graduate course at UCLA given by the author, this new book focuses on reliability science and the processing oft