中图分类法:	TN406-532 版次：
题名:	Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : [ 24-25 January, 2005, San Jose, California, USA /] / ,
出版发行:	出版地： Bellingham, Wash. : 出版社： SPIE, 出版日期： c2005.
载体形态:	xliii, 220 p. : ill. ; 28 cm.
附注:	Previous conferences entitled: Reliability, testing, and characterization of MEMS/MOEMS.
主题词:	Microelectromechanical systems Reliability
主题词:	Microelectromechanical systems Testing
主要责任者:	Tanner, Danelle Mary,
主要责任者:	Ramesham, Rajeshuni.
其它题名:	Reliability, testing and characterization of MEMS/MOEMS