HEA|  |01697nam0 2200313   45  
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100|  |▼a19920916a19839999m  y0engy0120    ba
101|0 |▼aeng
102|  |▼aUSA
110|  |▼aaga    0uu0
200|10|▼aJournal of vacuum science & -
   |  |technology▼hA
207| 0|▼as.2, v.1 (1983)-
210|  |▼aNew York, N.Y.▼cAmerican Ins-
   |  |titute of Physics▼d1983-
431|  |▼12001▼a0022-5355
530|0 |▼aJournal of vacuum science & -
   |  |technology. A. Vacuum, surface-
   |  |s, and films
531|  |▼aJ. vac. sci. technol., A, Va-
   |  |c. surf. films
541|1 |▼a（美）真空科学与技术杂志．Ａ辑，真空、表面与膜-
676|  |▼a621.5/5/05
690|  |▼aO552
712|0 |▼aAmerican Vacuum Society
712|0 |▼aAmerican Institute of Physics
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