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101|0 |▼aeng
102|  |▼aNLD
110|  |▼aaha    0uu0
200|10|▼aMicroelectronic engineering
207| 0|▼av.1 (1983)-
210|  |▼aAmsterdam▼cElsevier Science -
   |  |Publishers B.V.
541|1 |▼a（荷）微电子工程
690|  |▼aTN4
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